MEMS technology and IC technology have become more important than ever before. They have become the technological frontier in the 21st century, and have provided technical means for technological development in many fields. MEMS can intersect with multidisciplinary technologies to form various MEMS structures and systems. With the development of information technology, MEMS technology has expanded to multiple technical fields and markets, and the concept of the ultra-Moore law has gradually become clear. The first application of MEMS technology is in MEMS sensor technology. The main application now and in the future is based on sensor technology to form a MEMS system.

Multi-functional combination application is the development trend

At present, the application of MEMS sensors and microsystems is mainly divided into low-cost products such as smart phones, tablet devices and other consumer applications, the need for temperature, pressure, humidity, gyro and acceleration sensors; low-power products, such as Public safety, environmental monitoring MEMS sensors such as temperature, pressure, humidity, gas, wind speed, and wind direction of the IOT node information; highly reliable products such as MEMS sensors for automotive electronics: high-end high-priced products such as A variety of industrial, mining, oilfield, aerospace, and other controlled MEMS sensors; special needs products, such as MEMS biochip products, for medical examination. As can be seen from the above several sensor application requirements, a multi-functional sensor combination application will replace a single-function MEMS device.

The market demand for the Internet of Things is an example of the full utilization of the multidisciplinary characteristics of MEMS technology. To achieve specific parameters monitoring, data analysis and transmission in a specific range, not only low-power MEMS sensors are required for information acquisition, but also interfaces capable of converting and transmitting these information. In the unmanned surveillance area, the sensor nodes must be able to continue working, MEMS sensors acquire signals, integrated ASIC circuits perform signal conversion and processing, RF-MEMS transmit signals, and MEMS batteries provide energy for each node unit.

Multi-functional composite sensors and integrated sensors with integrated signal processing and conversion circuitry are the clearest markets due to ease of use. MEMS technology can realize integrated sensors, which can integrate the components in the auxiliary circuit and the sensing elements on a single chip, thus having functions of calibration, compensation, self-diagnosis, and network communication. For example, temperature, pressure, humidity, gyro, acceleration, and magnetometers are used as a multi-sensor. Two-piece packages or stacked packages and analog ASICs and digital ASICs form an integrated sensor.

On the basis of integrated sensors, intelligence can be realized, and intelligent sensors are the result of a combination of microcomputers and sensors. It combines the functions of detection, judgment and information processing. Compared with traditional sensors, intelligent sensors have many distinctive features, such as self-diagnosis and self-calibration functions, judgment and information processing functions; they can correct measurement values ​​and compensate for errors, thereby improving measurement accuracy; and can also achieve multiple sensors and more. Parametric measurements, measured data are accessible, data communication interfaces, and direct communication with microcomputers.

Need government support

Bosch, Texas Instruments and STMicroelectronics are currently the top MEMS suppliers in the world and their market size is in the billions of dollars. In the face of this kind of transnational semiconductor giant, Chinese companies cannot be self-respected and do not need to be self-important. First, we also have our own advantages. China’s own consumer electronics market is vast, the automotive industry is booming, and environmental security is attracting more and more attention. These can be achieved through a cross-industry joint approach and gradually strive for the MEMS market. Opportunity to strive for a bigger international market. Second, we must put our eyes on the long-term perspective on technological development.

For some of the current internationally accepted technologies, the introduction method should be adopted to shorten the research period, identify the next stage of technical requirements, and concentrate investment on technical reserves. Third, make overall plans. The overall technical capacity building of the industrial chain is very important. The development of MEMS sensor technology requires the development of the entire industry chain. Material research and equipment manufacturing also need to keep up with the rapid development. Fourth, the functional design of MEMS sensors should be considered from the application point of view, forming an overall technical solution for a variety of sensor combinations, and directly introducing analog, digital ASIC and FPGA technologies.

The development of MEMS technology in various countries is inseparable from the strong support of the government. China should also arrange and promote this. However, from a certain point of view, IC industry and MEMS technology are industries that embody comprehensive national strength, and they are also considered as high-tech representatives in developed countries. New material development capabilities, equipment manufacturing capabilities, precision machining capabilities, engineering design simulation software development capabilities, and the development of related technical personnel are all necessary foundations for an advanced IC and MEMS industrial chain. IC and MEMS are industries that require large-scale development. If China can form multiple industrial chains based on Northeast China, North China, Northwest China, Southwest China, Pearl River Delta, and Yangtze River Delta, it will not only ensure that China will not fall behind in the 21st century information technology era. The status is also a strategic requirement that can prevent foreign technology blockades.

In terms of MEMS production, the strategy adopted in the development of MEMS sensors at the 49 sites is practical. It can be said to be a hybrid mode of IDM mode, Fablite mode, and Fabless mode. The MEMS and IC integration part, that is, the part involving the ASIC, adopts the external cooperation model; and regarding the MEMS sensitive chip production process, the 49 companies actively expand the production. Since 49 has a variety of sensor development and manufacturing capabilities, the integration of more sensors is a technical strength of 49.